Multi-axis system sets new standards in terms of accuracy

The combination of air bearing technology and lightweight construction in a gantry system meets the highest demands in terms of dynamics and accuracy.

The production of microelectronics is becoming more and more precise. In order to meet the very high requirements for accuracy and dynamics, JAT is designing a gantry with an innovative combination of technologies for an energetic all-round impact. As a foundation, granite has high thermal stability and very good vibration damping, making it ideal when it comes to precision in the nanometer range. A CFRP axis moves on air bearings without friction. Due to its high mechanical and thermal resilience, the composite material CFRP is predestined for this application. Due to the friction-free process and the minimal mass of the lightweight axis, accelerations of 100 m/s2 and better can be implemented.