MICRO-EPSILON Optronic GmbH
Confocal line sensor confocalLINE CLI8500
2,624 points per profile, 0.2 µm Z resolution and SMART evaluation in the sensor
The new confocalLINE sensors enable high-precision scans with maximum point density and high speed. They reliably measure a wide range of surfaces and provide precise 3D data for demanding measurement tasks in semiconductor production, electronics manufacturing and precision engineering. Thanks to integrated SMART evaluation and modern fieldbus interfaces, complex measurement and inspection tasks can be solved directly in the sensor - fast, stable and highly precise.
https://www.micro-epsilon.com/2d-3d-measurement/confocal-line-sensor/
Other products & services
Laser profile scanner scanCONTROL 8500
4K resolution, maximum speed and integrated 3D processing.
3D-snapshot-sensor surfaceCONTROL 3D 3560
SMART mode for easy 3D inspection: evaluation directly in the sensor, no external processing unit needed.
Laser sensor optoNCDT 5500
Highest precision at an extremely high measuring rate of 150 kHz across the full measuring range.
Capacitive sensors capaNCDT
Capacitive displacement measurement with nanometer resolution, high precision and excellent temperature stability.
Cofocal sensors confocalDT
Confocal distance measurement with nanometer resolution, high dynamics and reliable results on demanding surfaces.
White light interferometers interferoMETER
White light interferometry with up to 30 pm resolution and 6 kHz measuring rate for absolute distance measurement.
Laser distance sensor optoNCDT ILR3800
Laser distance measurement up to 150 m with reflector, 0.1 mm resolution and IO-Link.
LED micrometer optoCONTROL 2700
Fast non contact dimensional measurement with 10 kHz measuring rate and 10 nm resolution for precise quality control.
Draw-wire sensors wireSENSOR
Long measuring ranges, compact design, robust and versatile.