MICRO-EPSILON Optronic GmbH
White light interferometers interferoMETER
White light interferometry with up to 30 pm resolution and 6 kHz measuring rate for absolute distance measurement.
The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. The absolute interferometers enable stable measurement results with sub-nanometer resolution offering a comparatively large measuring range and offset distance. The interferometers are used for absolute distance and thickness measurements of transparent objects and wafers.
Convince yourself: measurement accuracy at the highest level for applications in industry and semiconductor machine building.
https://www.micro-epsilon.com/distance-sensors/interferometers/
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